The mesoscopic characterization of the microhardness of superhard films of TaN, TaC and Ta(N,C)
Release Time:2025-11-26 Hits:
Date of Publication: 2022-10-03
Journal: JOURNAL OF MATERIALS SCIENCE LETTERS
Volume: 15
Issue: 18
Page Number: 1601-1604
ISSN: 0261-8028