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强流脉冲离子束烧蚀等离子体沉积类金刚石薄膜

Release Time:2025-11-26  Hits:

Indexed by: Conference Paper

Date of Publication: 2022-06-30

Journal: TFC’03全国薄膜技术学术研讨会

Institution: 物理学院

Page Number: 1

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