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ICP等离子体中基片调谐自偏压特性及双稳态机理研究

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Affiliation of Participant(s):大连理工大学

Supported by:国家自然科学基金项目

Status:已结题

Project Approval Number:10175014

Date of Project Approval:2019-03-25

Scheduled completion time:2019-03-25

Date of Project Initiation:2002-01-01

Date of Project Completion:2004-12-31

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