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非平衡磁控溅射ICP增强电离会切磁场约束沉积技术

Release Time:2018-01-07  Hits:

Leading Scientist: 任春生

Institution: 大连理工大学

Project Source: 国家自然科学基金项目

Status: 已结题

Project Approval Number: 50277003

Date of Project Approval: 2019-03-25

Scheduled Completion Time: 2019-03-25

Date of Project Initiation: 2003-01-01

Date of Project Completion: 2005-12-31

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