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中气压射频辉光放电射流等离子体辅助纳米硅光电薄膜高速沉积

Release Time:2016-08-09  Hits:

Leading Scientist: 张家良

Project Source: 主管部门科技项目

Status: 结题

Supported by: The Department of International Cooperation and Exchange, Ministry of Education

Nature of Project: 纵向

Date of Project Approval: 2008-01-01

Scheduled Completion Time: 2010-09-01

Date of Project Initiation: 2008-09-01

Date of Project Completion: 2010-09-01

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