Current position: Home >> Scientific Research >> Research Projects

中气压射频辉光放电射流等离子体辅助纳米硅光电薄膜高速沉积

Hits:

Leading Scientist:zhangjialiang

Supported by:主管部门科技项目

Status:结题

Supported by:教育部国际合作与交流司

Nature of Project:纵向

Date of Project Approval:2008-01-01

Scheduled completion time:2010-09-01

Date of Project Initiation:2008-09-01

Date of Project Completion:2010-09-01

Pre One:利用DBD放电辅助解离制备碘原子高通量束流

Next One:新型DBD低温射流放电辅助高密度碘原子制备及原子束传输技术研究