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脉冲磁过滤阴极弧沉积中基片台悬浮电位研究

Release Time:2022-06-22  Hits:

Date of Publication: 2002-01-01

Journal: 核聚变与等离子体物理

Volume: 22

Issue: 4

Page Number: 243-248

ISSN: 0254-6086

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