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离子束增强沉积法制备Mo2N和Mo2-xTixN薄膜及其结构与性能研究

Release Time:2022-06-22  Hits:

Date of Publication: 2000-01-01

Journal: 核技术

Volume: 23

Issue: 7

Page Number: 483-487

ISSN: 0253-3219

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