location: Current position: Home >> Scientific Research >> Paper Publications

用发射光谱方法研究微波ECR等离子体电离特性

Hits:

Date of Publication:1997-01-01

Journal:大连理工大学学报

Volume:37

Issue:2

Page Number:238

ISSN No.:1000-8608

Note:新增回溯数据

Pre One:用冷等离子体技术制备TiO2/γ-Al2O3催化剂的方法

Next One:用发射光谱法测量ECR等离子体的特性