CH4或CH4+Ar介质阻挡放电中的离子能量和类金刚石膜制备
Release Time:2022-06-22 Hits:
Date of Publication: 2006-01-01
Journal: 物理学报
Institution: 物理学院
Issue: 3
Page Number: 1458-1463
ISSN: 1000-3290
Release Time:2022-06-22 Hits:
Date of Publication: 2006-01-01
Journal: 物理学报
Institution: 物理学院
Issue: 3
Page Number: 1458-1463
ISSN: 1000-3290