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CH4或CH4+Ar介质阻挡放电中的离子能量和类金刚石膜制备

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Date of Publication:2006-01-01

Journal:物理学报

Affiliation of Author(s):物理学院

Issue:3

Page Number:1458-1463

ISSN No.:1000-3290

Pre One:Ar/N2混合气体中的一种大尺度类辉光放电射流

Next One:用冷等离子体技术制备TiO_2/gamma-Al_2O_3催化剂的方法
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