Effect of the deposition conditions on the properties of photocatalytic WO3 thin films prepared by mid-frequency magnetron sputtering
Release Time:2022-06-22 Hits:
Date of Publication: 2019-01-01
Journal: MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Institution: 物理学院
Volume: 99
Page Number: 99-105
ISSN: 1369-8001