Diagnostics of Argon Inductively Coupled Plasma and Dielectric Barrier Discharge Plasma by Optical Emission Spectroscopy
Release Time:2022-06-22 Hits:
Date of Publication: 2001-01-01
Journal: Plasma Science and Technology
Institution: 物理学院
Volume: 3
Issue: 4
Page Number: 883
ISSN: 1009-0630