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Discharge characteristics of a radio-frequency capacitively coupled Ar/O-2 glow discharge at atmospheric pressure

Release Time:2024-02-29  Hits:

Date of Publication: 2022-10-02

Journal: THIN SOLID FILMS

Institution: 物理学院

Volume: 519

Issue: 20,SI

Page Number: 6990-6993

ISSN: 0040-6090

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