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Indexed by:期刊论文

Date of Publication:2022-06-29

Journal:物理学报

Volume:59

Issue:4

Page Number:2653-2660

ISSN No.:1000-3290

Abstract:The characteristics of the radio frequency plasma jets at atmospheric pressure in Ar/SiCl_4/H_2 gas mixture were studied in this paper by using optical emission spectroscopy.Firstly,the electron excitation temperature of plasmas was calculated from the Si atom spectral emission using Bohzmann plots,and then,based on the temperature,the number density of the Si atoms in the plasmas and the dissociation ratio of the SiCl_4 were estimated.Finally,the dependence of the excitation temperature,the number density of the Si atoms and the dissociation ratio of the SiCl_4 on the discharge power and the gas flow rate were presented.

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