Mechanism of metastable krypton atom preparation via laser-induced ionization
Release Time:2025-02-23 Hits:
Indexed by: Journal Papers
Document Code: 412578
Date of Publication: 2025-01-18
Journal: JOURNAL OF QUANTITATIVE SPECTROSCOPY & RADIATIVE TRANSFER
Volume: 330
ISSN: 0022-4073
Key Words: ENERGY; INDUCED BREAKDOWN; KINETICS; MICROLITHOGRAPHY