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Development of an atmospheric-pressure homogeneous and cold Ar/O-2 plasma source operating in glow discharge

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Indexed by:期刊论文

Date of Publication:2010-06-01

Journal:PHYSICS OF PLASMAS

Included Journals:SCIE、EI

Volume:17

Issue:6

ISSN No.:1070-664X

Abstract:An atmospheric-pressure Ar/O-2 glow discharge is generated in a parallel bare metal plate reactor with a radio-frequency power supply by introducing a dielectric strip in the inlet of the gas flow. The role of the dielectric strip is discussed experimentally. The allowable oxygen-to-argon ratio reaches 1.0 vol % and the generated Ar/O-2 plasma discharge is characterized by a low gas temperature and good spatial homogeneity, implying its feasible application as a type of material treatment for a large-area surface, as illustrated experimentally by the ashing of carbon black. (C) 2010 American Institute of Physics. [doi: 10.1063/1.3447877]

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