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一种等离子体增强非平衡磁控溅射方法

Release Time:2022-10-19  Hits:

First Author: XU Jun

Disigner of the Invention: 马腾才,邓新绿,张家良,陆文祺,董闯

Institution: 物理学院

Application Number: CN1338530

Authorization Number: CN01116734.3

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