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一种等离子体增强非平衡磁控溅射方法

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First Author:XU Jun

Disigner of the Invention:matengcai,dengxinlv,zhangjialiang,陆文祺,dongchuang

Affilication of Author(s):物理学院

Application Number:CN1338530

Authorization number:CN01116734.3

Pre One:一种负粒子推力器

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