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论文类型：期刊论文

发表时间：2012-06-01

发表刊物：REVIEW OF SCIENTIFIC INSTRUMENTS

收录刊物：SCIE、EI、PubMed

卷号：83

期号：6

页面范围：065102

ISSN号：0034-6748

摘要：To eliminate the effects of motion coupling for measuring cylindrical work pieces, a novel alignment mechanism integrating functions of both leveling and centering is designed and fabricated by introducing multi-layered orthogonal connected flexible hinges as the key supporting and joining elements. Different from traditional leveling mechanisms with many separate parts fabricated together, all of the flexible hinges were integrated in one three-dimensioned machining part without assembling process, and thus synchronously simplifying the structure and reducing assembly errors. Based on the screw theory, the mathematic model of the proposed alignment mechanism is established for any resolution requirements depending on screw characteristics. A millimeter-sized device is fabricated with the alignment precision of 1.0 mu m for centering within the range of +/- 1 mm and 1 in. for leveling within +/- 1 degrees. The experiment results are in very close agreement to those obtained by simulation, which validate the feasibility of introducing multi-layered orthogonal flexible hinges in the centering and leveling mechanisms. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4722946]