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无扩散阻挡层Cu膜的掺杂元素设计

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Leading Scientist:李晓娜

Supported by:省、市、自治区科技项目

Status:结题

Supported by:辽宁省科学技术厅

Nature of Project:纵向

Project Approval Number:20082164

Date of Project Approval:2008-01-01

Scheduled completion time:2010-12-31

Date of Project Initiation:2009-01-01

Date of Project Completion:2023-09-13

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