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无扩散阻挡层Cu膜的掺杂元素设计

Release Time:2016-08-09  Hits:

Leading Scientist: 李晓娜

Project Source: 省、市、自治区科技项目

Status: 结题

Supported by: Liaoning Provincial Department of Science and Technology

Nature of Project: 纵向

Project Approval Number: 20082164

Date of Project Approval: 2008-01-01

Scheduled Completion Time: 2010-12-31

Date of Project Initiation: 2009-01-01

Date of Project Completion: 2023-09-13

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