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Indexed by:期刊论文

Date of Publication:2008-09-04

Journal:6th International Symposium on Applied Plasma Science

Included Journals:SCIE、EI、CPCI-S、Scopus

Volume:83

Issue:1,SI

Page Number:205-208

ISSN No.:0042-207X

Key Words:Ion density; Plasma sheath; Magnetic field

Abstract:The ion density distribution of plasma sheath in an oblique magnetic field is investigated with a fluid model. We performed numerical simulations of the sheath. The results reveal that the magnetic field has significant effects on the plasma sheath, including ion density distribution and space charge density distribution. Two cases of ion incidence are considered here. Under suitable conditions, Lorentz force induces fluctuations in the ion density. And the magnetic field parallel to the board is responsible for these changes. The action states of ions are more complicated while the ions enter the sheath with an oblique incidence angle. Ions could gather in some regions, so that it leads to small peaks of the density curve. Also the space charge density in such regions is slightly higher. (C) 2008 Elsevier Ltd. All rights reserved.