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Indexed by:期刊论文

Date of Publication:2010-01-01

Journal:Plasma Science and Technology

Included Journals:EI

Volume:12

Issue:1

Page Number:41-45

ISSN No.:10090630

Abstract:A radio-frequency (rf) plasma sheath model in an oblique magnetic field is established and the energy distribution of ions (IED) incident on the rf sheath biased electrodes is numerically investigated. The simulation results reveal that the external magnetic field can have a decisive impact on the ion flux and energy distribution of the sheath. The ion energy can be transferred between the perpendicular and parallel components under the action of a magnetic field.