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中频孪生靶非平衡磁控溅射制备氮化硅薄膜及其性能(英文)

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Indexed by: Journal Article

Date of Publication: 2011-01-01

Journal: 材料科学与工程学报,Vol. 29, No.3,2011, 311-326

Volume: 29

Issue: 3

Page Number: 311-326

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