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中频孪生靶非平衡磁控溅射制备氮化硅薄膜及其性能(英文)

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Indexed by:期刊论文

Date of Publication:2011-01-01

Journal:材料科学与工程学报,Vol. 29, No.3,2011, 311-326

Volume:29

Issue:3

Page Number:311-326

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