Major:Plasma physics
Education Level:With Certificate of Graduation for Study as Master's Candidates
Degree:Master's Degree
Current Status:Graduated
Graduation Thesis Title: 高功率脉冲非平衡磁控溅射法制备CrNx膜和Cu膜及其沉积特性的研究
Date of Registration:2008-09-01
Date of Graduation:2011-07-05