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一种交叉场放电共振耦合的控制方法

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First Author:Mu Zongxin

Disigner of the Invention:jiali,牟晓东,王春,Liu Shengguang

Application Number:CN201010300432.6

Authorization Date:2010-01-19

Authorization number:CN101835334A

Pre One:一种利用驻波共振耦合电能的磁控放电方法
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