Release Time:2019-03-12  Hits:

Indexed by: Journal Article

Date of Publication: 2006-12-01

Journal: 6th East Asian Conference on Chemical Sensors (EACCS-6)

Included Journals: ISTIC、PKU、CPCI-S、SCIE

Volume: 35

Page Number: 436-438

ISSN: 1002-185X

Key Words: tactile sensor; piezoelectric; edoscopic grasper

Abstract: This paper reports the design and fabrication of a MEMS-based ZnO piezoelectric tactile sensor, which can be integrated on to the endoscopic grasper used in minimally invasive surgery (MIS). The sensor includes a silicon substrate, platinum bottom electrode, platinum top electrode, and a ZnO piezoelectric thin film, which is sandwiched between the two-electrode layers. The sensitivity of the micro-force sensor is analyzed in theory and the sensor exhibits high sensitivity about 7 pc/uN. The application of this tactile sensor to MIS will allow the surgeon feeling the touch force between the endoscopic grasper and tissue in real-time, and manipulating the tissue safely.