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Indexed by:期刊论文

Date of Publication:2006-12-01

Journal:6th East Asian Conference on Chemical Sensors (EACCS-6)

Included Journals:SCIE、CPCI-S、PKU、ISTIC

Volume:35

Page Number:436-438

ISSN No.:1002-185X

Key Words:tactile sensor; piezoelectric; edoscopic grasper

Abstract:This paper reports the design and fabrication of a MEMS-based ZnO piezoelectric tactile sensor, which can be integrated on to the endoscopic grasper used in minimally invasive surgery (MIS). The sensor includes a silicon substrate, platinum bottom electrode, platinum top electrode, and a ZnO piezoelectric thin film, which is sandwiched between the two-electrode layers. The sensitivity of the micro-force sensor is analyzed in theory and the sensor exhibits high sensitivity about 7 pc/uN. The application of this tactile sensor to MIS will allow the surgeon feeling the touch force between the endoscopic grasper and tissue in real-time, and manipulating the tissue safely.