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Indexed by:会议论文

Date of Publication:2006-09-26

Included Journals:EI、CPCI-S、Scopus

Page Number:295-300

Key Words:dynamic characteristic; residual stress; FEM; MEMS

Abstract:The residual stresses produced in manufacturing process play an important role in the reliability of MEMS devices. To study the dynamic characteristics of MEMS devices with it, the dynamical equation including the stresses produced by dead load is discussed based on the Hamilton's principle. The effects of stress caused by the inertial force on the natural frequencies of micromachining beam-proof mass structure were analyzed with finite-element method (FEM). From the FEM equation, it can be found that the whole stiffness increases with the external load and thus the natural frequency becomes higher. The natural frequencies of micromachining accelerometers were calculated with FEM programs. The results show that the natural frequency gets higher as the inertial force increases. The sizes of the structure also affect the natural frequencies when it is under high-g force acceleration. The study reveals the effects of residual stress on the dynamic characteristics of MEMS devices and has practical significance for design and fabrication of high g-force micro-inertial components.