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Indexed by:期刊论文

Date of Publication:2010-03-01

Journal:JOURNAL OF MATERIALS PROCESSING TECHNOLOGY

Included Journals:SCIE、EI

Volume:210

Issue:4

Page Number:696-702

ISSN No.:0924-0136

Key Words:Filling modes; Submicron and nano-scale; Glassy polymer; Dual-peak filling

Abstract:In (his Study, we used a glass mold coated with TiN layer to fabricate submicron and nano-gratings on a PMMA (polyrnethylinethacrylate) film The cavities on the mold, with sizes varying from 71 nm to 980nm, was etched by ion beam The deformation and filling modes of polymer during fabrication modes of were Studied Dual-peak deformations, which were considered as the characteristic filling modes of "viscous-dominant" polymer. were observed Because our fabrication experiments were conducted near the glass transition temperature (T(g)) of PMMA at which the polymer was "elastic-plastic-dominant", (lie appearance of the dual-peak filling mode meant solid-state polymer might exhibit some characters of fluidic polymer at submicion and nano-scale In addition, we presented a simple and effective mold release process at the end of this paper. which Could reduce defects during molding release process (C) 2009 Elsevier B.V. All rights reserved