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一种用于MEMS动态特性测试的底座激励装置

Release Time:2019-03-09  Hits:

First Author: 佘东生

Disigner of the Invention: 王立鼎,李晓轲,张习文,王晓东

Application Number: CN200910010123.2

Authorization Date: 2009-01-14

Authorization Number: CN101476970

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