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Indexed by:期刊论文

Date of Publication:2011-04-01

Journal:13th International Meeting on Chemical Sensors (IMCS-13)

Included Journals:CPCI-S、SCIE、EI、Scopus

Volume:9

Issue:2

Page Number:670-674

ISSN No.:1546-198X

Key Words:Humidity Sensor; Zirconia Thin Film; Sol-Gel; Multi-Layered

Abstract:Multi-layered zirconia (ZrO(2)) thin film on the Pt/Ti/SiO(2)/Si substrate has been prepared as humidity sensing material by sol gel method. Annealing temperature was 450 degrees C. A TiO(2) thin film was added in between ZrO(2) film and the substrate for improving the adhesion. The films were characterized by using X-ray diffraction (XRD), atomic force microscope (AFM) and Fourier-transform infrared (FT-IR) spectra. The impedance of the humidity sensor changes about four orders of magnitude within the relative humidity (RH) range of 11-98%, indicating a good sensitivity. The response time of the sensor was about 5 s. The humidity sensing mechanism was discussed by means of the complex impedance curves and an equivalent circuit of the sensor.