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论文类型：会议论文

发表时间：2010-01-01

收录刊物：CPCI-S、SCIE

页面范围：599-601

关键字：humidity sensor; surface-type; sandwich-type; resistance property; capacitance property; impedance property; humidity mechanism

摘要：The surface-type aud the saudwich-type humidity sensors were fabricated with nanometer barium titanate fdm. The resistance, capacitance and impedance properties of the sensors were measured and analyzed at different frequency when relative humidity (RH) changes from 11% RH to 98% RH. The two types of humidity sensors have the similar properties. The results indicate the high sensitivity and influence of frequency. The resistance and the impedance mainly decrease while the capacitance rises as the relative humidity increases. The former are affected greatly by the frequency in low RH but hardly in high RH. The frequency has a various effect on the latter at the whole RH range and the linearity of the Capacitance-frequency (C-t) curve is good. The curves of the impedance are quite consistent with that of the resistance. The humidity mechanisms are discussed based on this. We consider that the humidity sensitive properties are determined mainly by the abundant interfaces among grains, which are affected by the absorbed water.