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论文类型：期刊论文

发表时间：1997-01-01

发表刊物：Wuli Xuebao/Acta Physica Sinica

收录刊物：PKU、Scopus

卷号：46

期号：12

页面范围：2383-

ISSN号：10003290

摘要：In this paper, we use the Monte-Carlo method to simulate the complete course, in which the ions pass through the neutral, sheath, and the shield regions of a virtual cathode formed by the secondary electrons near the workpiece surface, and finally are absorbed by the surface of the workpiece with negative bias in ECR microwave plasma. The nonlinear cylinder Poisson equations is solved successfully with "trial" method, and the smoothed and self-limits spectrum of potential and distributions of energy and angle at the surface of workpiece are obtained. The magnetic filed, gas pressure and secondary effects on the potential of sheath are also discussed.