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个人信息Personal Information
教授
博士生导师
硕士生导师
任职 : 国际磨粒技术学会（International Committee of Abrasive Technology, ICAT）委员，中国机械工程学会极端制造分会副主任、生产工程分会常务委员、微纳米制造技术分会常务委员，中国机械工程学会生产工程分会磨粒加工技术专业委员会副主任、切削加工专业委员会常委委员、精密工程与微纳技术专业委员会常委委员，中国机械工程学会特种加工分会超声加工技术委员会副主任，中国机械工程学会摩擦学分会微纳制造摩擦学专业委员会常务委员，中国机械工业金属切削刀具协会切削先进制造技术研究会常务理事、对外学术交流工作委员会副主任、切削先进制造技术研究会自动化加工技术与系统委员会副主任。
性别：男
毕业院校：西北工业大学
学位：博士
所在单位：机械工程学院
学科：机械制造及其自动化. 机械电子工程. 航空宇航制造工程
办公地点：机械工程学院7191
电子邮箱：kangrk@dlut.edu.cn
Nonlinear Compression Behavior of the Grooved Polishing Pad: A Model and Its Validation
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论文类型：期刊论文
发表时间：2017-01-01
发表刊物：ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY
收录刊物：SCIE、EI
卷号：6
期号：4
页面范围：P178-P183
ISSN号：2162-8769
摘要：Stiffness analysis of the grooved pad is important to study the mechanical action and slurry flow in CMP process. This paper investigates the nonlinear compression behavior of the grooved pad and then presents a mathematical model to calculate the compressive stiffness of the polishing pad with micro roughness and macro grooved textures. The compressive stiffness of two kinds of pads with different surface structures is analyzed. The results are compared with the FEM model and the uniform thick layer (UTL) model, which are extensively employed in the analysis of pad stiffness. It verifies that the proposed model shows a good agreement with the FEM model. Additional experiments are conducted to validate the accuracy of the proposed semi-empirical formula considering the compressive stiffness of the asperity layer. It is worth mentioning that the error will be more than 24% in calculating the tested grooved pad stiffness by traditional UTL model. In the proposed model, the relationship between the pad stiffness and the geometrical parameters is depicted explicitly, which is convenient for designing the groove structure to achieve a desirable polishing performance. (c) 2017 The Electrochemical Society. All rights reserved.