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个人信息Personal Information
教授
博士生导师
硕士生导师
任职 : 国际磨粒技术学会（International Committee of Abrasive Technology, ICAT）委员，中国机械工程学会极端制造分会副主任、生产工程分会常务委员、微纳米制造技术分会常务委员，中国机械工程学会生产工程分会磨粒加工技术专业委员会副主任、切削加工专业委员会常委委员、精密工程与微纳技术专业委员会常委委员，中国机械工程学会特种加工分会超声加工技术委员会副主任，中国机械工程学会摩擦学分会微纳制造摩擦学专业委员会常务委员，中国机械工业金属切削刀具协会切削先进制造技术研究会常务理事、对外学术交流工作委员会副主任、切削先进制造技术研究会自动化加工技术与系统委员会副主任。
性别：男
毕业院校：西北工业大学
学位：博士
所在单位：机械工程学院
学科：机械制造及其自动化. 机械电子工程. 航空宇航制造工程
办公地点：机械工程学院7191
电子邮箱：kangrk@dlut.edu.cn
A mixed elastohydrodynamic lubrication model for simulation of chemical mechanical polishing with double-layer structure of polishing pad
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论文类型：期刊论文
发表时间：2015-03-01
发表刊物：INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
收录刊物：SCIE、EI、Scopus
卷号：77
期号：1-4
页面范围：107-116
ISSN号：0268-3768
关键字：Chemical mechanical polishing; Elastohydrodynamic lubrication; Multi-layered elastic theory; Wafer; Material removal rate
摘要：Mixed elastohydrodynamic lubrication (EHL) model has been used to study slurry flow and contact pressure distribution in the chemical mechanical polishing (CMP) process. However, in various mixed EHL simulation frameworks, only a single-layer polishing pad is considered. Consequently, the double-layer polishing pad, which is widely used in semiconductor industry, cannot be designed and optimized from the tribology perspective with the assistance of theoretical simulation. In this paper, multi-layered elastic theory (MLET), which is frequently used to calculate flexible pavement response to truck loading, is introduced into the mixed EHL model. Pad deformation calculated by the MLET has a similar accuracy to that by the 3D finite element method, but its computational cost is much lower. It is very important for accurate and efficient simulation of the tribological behavior and material removal rate (MRR) in CMP. Based on the new simulation method, advantages of a different double-layer structure of polishing pad are discussed. It is found that the upper-hard lower-soft pad has better performance for improving the uniformity of MRR when the wafer surface is uneven, but the boundary exclusion region is bigger than single-layer pad and upper-soft lower-hard pad. The upper-soft lower-hard pad has advantage to reducing the edge exclusion, but the effect is not remarkable when the thickness of the upper layer is not extremely thinner than the lower layer.