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个人信息Personal Information
教授
博士生导师
硕士生导师
任职 : 国际磨粒技术学会（International Committee of Abrasive Technology, ICAT）委员，中国机械工程学会极端制造分会副主任、生产工程分会常务委员、微纳米制造技术分会常务委员，中国机械工程学会生产工程分会磨粒加工技术专业委员会副主任、切削加工专业委员会常委委员、精密工程与微纳技术专业委员会常委委员，中国机械工程学会特种加工分会超声加工技术委员会副主任，中国机械工程学会摩擦学分会微纳制造摩擦学专业委员会常务委员，中国机械工业金属切削刀具协会切削先进制造技术研究会常务理事、对外学术交流工作委员会副主任、切削先进制造技术研究会自动化加工技术与系统委员会副主任。
性别：男
毕业院校：西北工业大学
学位：博士
所在单位：机械工程学院
学科：机械制造及其自动化. 机械电子工程. 航空宇航制造工程
办公地点：机械工程学院7191
电子邮箱：kangrk@dlut.edu.cn
Effect of mechanical anisotropy on material removal rate and surface quality during polishing CdZnTe wafers
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论文类型：期刊论文
发表时间：2011-08-01
发表刊物：RARE METALS
收录刊物：SCIE、EI、CSCD
卷号：30
期号：4
页面范围：381-386
ISSN号：1001-0521
关键字：cadmium compounds; single crystals; nanoscratch tests; frictional coefficient; material removal rate; surface quality; anisotropy
摘要：The mechanical characters of CdZnTe crystal were investigated by nanoscratch tests, and the effects of mechanical anisotropy on the material removal rate and surface quality were studied by polishing tests. There is a peak of frictional coefficient at the early stage of scratch, and increasing the vertical force will result in the increase of peak value correspondingly. The fluctuation phenomenon of frictional coefficient is generated at high vertical force. The lateral forces show the apparent twofold and threefold symmetries on (110) and (111) planes, respectively. To obtain high surface quality, low polishing pressure and hard direction (<(1)over-bar10 > directions on (110) plane and < 11(2)over-bar > directions on (111) plane) should be selected, and to achieve high material removal rate, high polishing pressure and soft direction (< 001 > directions on (110) plane and <(1)over-bar2(1)over-bar > directions on (111) plane) should be selected.