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个人信息Personal Information
教授
博士生导师
硕士生导师
任职 : 国际磨粒技术学会（International Committee of Abrasive Technology, ICAT）委员，中国机械工程学会极端制造分会副主任、生产工程分会常务委员、微纳米制造技术分会常务委员，中国机械工程学会生产工程分会磨粒加工技术专业委员会副主任、切削加工专业委员会常委委员、精密工程与微纳技术专业委员会常委委员，中国机械工程学会特种加工分会超声加工技术委员会副主任，中国机械工程学会摩擦学分会微纳制造摩擦学专业委员会常务委员，中国机械工业金属切削刀具协会切削先进制造技术研究会常务理事、对外学术交流工作委员会副主任、切削先进制造技术研究会自动化加工技术与系统委员会副主任。
性别：男
毕业院校：西北工业大学
学位：博士
所在单位：机械工程学院
学科：机械制造及其自动化. 机械电子工程. 航空宇航制造工程
办公地点：机械工程学院7191
电子邮箱：kangrk@dlut.edu.cn
Chemical mechanical polishing and nanomechanics of semiconductor CdZnTe single crystals
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论文类型：期刊论文
发表时间：2008-10-01
发表刊物：SEMICONDUCTOR SCIENCE AND TECHNOLOGY
收录刊物：SCIE、EI、Scopus
卷号：23
期号：10
ISSN号：0268-1242
摘要：(1 1 1), (1 1 0) Cd(0.96)Zn(0.04)Te and (1 1 1) Cd(0.9)Zn(0.1)Te semiconductor wafers grown by the modified vertical Bridgman method with dimensions of 10 mm x 10 mm x 2.5 mm were lapped with a 2-5 mu m polygonal Al(2)O(3) powder solution, and then chemically mechanically polished by an acid solution having nanoparticles with a diameter of around 5 nm, corresponding to the surface roughnesses Ra of 2.135 nm, 1.968 nm and 1.856 nm. The hardness and elastic modulus of (1 1 1), (1 1 0) Cd0.96Zn0.04Te and (1 1 1) Cd0.9Zn0.1Te single crystals are 1.21 GPa, 42.5 GPa; 1.02 GPa, 44.0 GPa; and 1.19 GPa, 43.4 GPa, respectively. After nanocutting is performed by the Berkovich nanoindenter, the surface roughness Ra of the (1 1 1) Cd0.9Zn0.1Te single crystal attains a 0.215 nm ultra-smooth surface. The hardness and elastic modulus of three kinds of CdZnTe single crystals decrease with the increase of indentation load. When the nanoindenter departs the surface of the crystals, the adherence effects are obvious for the three kinds of single crystals. This is attributed to the plastic sticking behavior of CdZnTe material at a nanoscale level. When the indentation load of the three kinds of CdZnTe single crystals is in the range of 4000-12 000 mu N, the adhered CdZnTe material on the nanoindenter falls onto the surface and accumulates around the nanoindentation.