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个人信息Personal Information
教授
博士生导师
硕士生导师
任职 : 国际磨粒技术学会（International Committee of Abrasive Technology, ICAT）委员，中国机械工程学会极端制造分会副主任、生产工程分会常务委员、微纳米制造技术分会常务委员，中国机械工程学会生产工程分会磨粒加工技术专业委员会副主任、切削加工专业委员会常委委员、精密工程与微纳技术专业委员会常委委员，中国机械工程学会特种加工分会超声加工技术委员会副主任，中国机械工程学会摩擦学分会微纳制造摩擦学专业委员会常务委员，中国机械工业金属切削刀具协会切削先进制造技术研究会常务理事、对外学术交流工作委员会副主任、切削先进制造技术研究会自动化加工技术与系统委员会副主任。
性别：男
毕业院校：西北工业大学
学位：博士
所在单位：机械工程学院
学科：机械制造及其自动化. 机械电子工程. 航空宇航制造工程
办公地点：机械工程学院7191
电子邮箱：kangrk@dlut.edu.cn
Unusual stress behaviour of La(2)O(3)- and CeO(2)-doped diamond-like carbon nanofilms
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论文类型：期刊论文
发表时间：1900-01-01
发表刊物：PHILOSOPHICAL MAGAZINE LETTERS
收录刊物：SCIE、EI、Scopus
卷号：88
期号：8
页面范围：567-574
ISSN号：0950-0839
关键字：La(2)O(3); CeO(2); DLC; residual compressive stress
摘要：Diamond-like carbon (DLC) and seven kinds of La(2)O(3)- and CeO(2)-doped DLC composite nanofilms were deposited by unbalanced magnetron sputtering. Raman spectra show that these deposited films have the obvious characteristics of amorphous DLC films. X-ray photoelectron spectroscopy confirms that the La(2)O(3) and CeO(2) are formed within the DLC films. Combining the C1s spectrum and Raman spectra, the DLC amorphous structure is not changed with the doping of La(2)O(3) and CeO(2). Auger electron spectroscopy exhibits that La, Ce, O and C elements distribute uniformly along the depth direction, and they diffuse into the substrate at the interface between the substrate and film. Residual compressive stress of pure DLC films is 0.9 GPa, and those of La(2)O(3) and CeO(2) doped DLC films are lower than 0.25 GPa. The residual stress of seven kinds of rare earth oxides doped DLC films reduces to lower than 1/3 of that of pure DLC films. When the composite concentration of rare earth oxides is less than or equal to 9%, the residual compressive stress is in the range of 0.01-0.02 GPa, which is 1/90-1/45 of that of pure DLC films, indicating unusual stress behaviour.