Release Time:2019-03-11  Hits:

Indexed by: Conference Paper

Date of Publication: 2011-04-16

Included Journals: Scopus、CPCI-S、EI

Volume: 204-210

Page Number: 1086-+

Key Words: micro pressure sensor; micro hot plate; coupling analysis; electro-thermal-mechanical Coupled

Abstract: In this paper, electro-thermal-mechanical theoretical analysis of micro-hotplate-based micro gas pressure sensor is carried out, which is on basis of the classical heat transfer theory and rarefied gas dynamics. Combined with micro-hotplate (MHP) theory analysis of heat transfer and thermal-mechanical finite element modeling, electro-thermal-mechanical coupled analysis of theoretical models with regard to the MHP-based micro gas pressure sensor is built. Then, through the ANSYS-one of the finite element analysis software-the simulation analysis of MHP went well. The simulation results show that MHP generates a smaller deformation because of adding the thermal conductivity, and MHP provides a more feasible analysis method in the theoretical study of micro hotplate.