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论文类型：期刊论文

发表时间：2011-08-01

发表刊物：Sensors and Transducers

收录刊物：EI、Scopus

卷号：131

期号：8

页面范围：8-20

ISSN号：17265479

摘要：The electrothermal theoretical analysis of micro-hotplate-based air pressure sensor is carried out and its model is built up, which is based on the classical heat transfer theory and rarefied gas dynamics. According to the heat transfer theory analysis of the micro hotplate (MHP) and the thermal finite element simulation, coupled electro-thermal-mechanical model of micro-hotplate-based air pressure sensor is established. The finite element analysis software ANSYS helps to process thermal analysis for the micro hotplate, and the appropriate width of supporting bridge is chosen. The paper carried out a transient response analysis for the micro hotplate, which showed the changing process of the temperature and deformation of MHP in detail for further study. The research work provided a more feasible analysis method in the theoretical study of micro hotplate. ? 2011 IFSA.