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Indexed by:期刊论文

Date of Publication:2015-01-01

Journal:JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS

Included Journals:SCIE、EI、Scopus

Volume:14

Issue:1

ISSN No.:1932-5150

Key Words:bionic navigation; nanoimprint lithography; complementary-metal-oxide-semiconductor sensor; integrated optoelectronics

Abstract:Based on the navigation strategy of insects utilizing the polarized skylight, an integrated polarization-dependent sensor for autonomous navigation is presented. The navigation sensor has the features of compact structure, high precision, strong robustness, and a simple manufacture technique. The sensor is composed by integrating a complementary-metal-oxide-semiconductor sensor with a multiorientation nanowire grid polarizer. By nanoimprint lithography, the multiorientation nanowire polarizer is fabricated in one step and the alignment error is eliminated. The statistical theory is added to the interval-division algorithm to calculate the polarization angle of the incident light. The laboratory and outdoor tests for the navigation sensor are implemented and the errors of the measured angle are +/- 0.02 deg and +/- 1.3 deg, respectively. The results show that the proposed sensor has potential for application in autonomous navigation. (C) 2015 Society of Photo-Optical Instrumentation Engineers (SPIE)