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Indexed by:期刊论文

Date of Publication:2008-01-01

Journal:INTERNATIONAL JOURNAL OF NONLINEAR SCIENCES AND NUMERICAL SIMULATION

Included Journals:SCIE、Scopus

Volume:9

Issue:4

Page Number:333-338

ISSN No.:1565-1339

Key Words:Reduced-order model; Krylov subspace; microgripper

Abstract:The conventional numerical analysis methods could not perform the rapid system-level simulation to MEMS especially when it containing sensing and testing integrated circuit. The behavior characteristic of multiphysical energy domain models including nonlinear analysis can be simulated by using reduced-order model. This paper set up the reduced-order model of electrothermal microgripper using Krylov subspace projection method. The system functions were assembled through finite element analysis using Ansys. We took the structure-electro-thermal analysis to microgripper finite element model and reduced finite element functions order through second-order Krylov subspace. projection method based on Arnoldi process. The simulation result from electrothermal reduced order model of microgripper is accurately compared with finite element analysis and even more needs a few computing consuming.