Release Time:2019-03-10  Hits:

Indexed by: Journal Article

Date of Publication: 2008-01-01

Journal: INTERNATIONAL JOURNAL OF NONLINEAR SCIENCES AND NUMERICAL SIMULATION

Included Journals: Scopus、SCIE

Volume: 9

Issue: 4

Page Number: 333-338

ISSN: 1565-1339

Key Words: Reduced-order model; Krylov subspace; microgripper

Abstract: The conventional numerical analysis methods could not perform the rapid system-level simulation to MEMS especially when it containing sensing and testing integrated circuit. The behavior characteristic of multiphysical energy domain models including nonlinear analysis can be simulated by using reduced-order model. This paper set up the reduced-order model of electrothermal microgripper using Krylov subspace projection method. The system functions were assembled through finite element analysis using Ansys. We took the structure-electro-thermal analysis to microgripper finite element model and reduced finite element functions order through second-order Krylov subspace. projection method based on Arnoldi process. The simulation result from electrothermal reduced order model of microgripper is accurately compared with finite element analysis and even more needs a few computing consuming.