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个人信息Personal Information
教授
博士生导师
硕士生导师
性别:男
毕业院校:北京航空航天大学
学位:博士
所在单位:机械工程学院
学科:机械电子工程. 微机电工程. 测试计量技术及仪器
办公地点:机械大方楼6019
联系方式:0411-84706108
电子邮箱:chujk@dlut.edu.cn
Infrared micropolarizer array fabricated using a reversal nanoimprint
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论文类型:期刊论文
发表时间:2018-03-01
发表刊物:APPLIED OPTICS
收录刊物:SCIE、EI、Scopus
卷号:57
期号:7
页面范围:1530-1533
ISSN号:1559-128X
摘要:Using a reversal nanoimprint and metal evaporation process, we fabricated a micropolarizer array for the 2.5-7 mu m wavelength region. The micropolarizer array has a unique unit, which is composed of 2 x 3 arrays on an intrinsic silicon substrate. Each array consists of a 200 nm period bilayer Al grating in a 1.3 mm x 1.3 mm aperture. The transmittance of transverse magnetic polarization of each array is greater than 65% in the 2.5-7 mu m wavelength range, and the extinction ratio is over 35 dB in the 3-4 mu m and 6-7 mu m wavelength range. This fabricated micropolarizer array has lower costs and better compatibility with microfabrication processes. (C) 2018 Optical Society of America