褚金奎

个人信息Personal Information

教授

博士生导师

硕士生导师

性别:男

毕业院校:北京航空航天大学

学位:博士

所在单位:机械工程学院

学科:机械电子工程. 微机电工程. 测试计量技术及仪器

办公地点:机械大方楼6019

联系方式:0411-84706108

电子邮箱:chujk@dlut.edu.cn

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Research of radioisotope microbattery based on beta-radio-voltaic effect

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论文类型:期刊论文

发表时间:2009-04-01

发表刊物:JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS

收录刊物:SCIE、EI

卷号:8

期号:2

ISSN号:1537-1646

关键字:radioisotope; microbattery; selective emitter

摘要:With the development of MEMS, micropower has gradually become one of the essential problems in MEMS applications. The structure of the selective emitter radioisotope microbattery is investigated in detail. The working principle of a radioisotope microbattery is discussed at first. Then the design of the radioisotope microbattery is proposed around the aspects of shape structure and doping mode. Next, a prototype of the radioisotope microbattery in three different shape structures with two doping modes is fabricated. Finally, the prototype of the radioisotope microbattery is tested at Beijing Atom HighTech Incorporated. After comparing the selective emitter radioisotope (SER) microbattery and back surface field (BSF) microbattery, the results indicate the characteristic of the SER microbattery has better performance with the type of inverted pyramid array and V channel array. (c) 2009 Society of Photo-Optical Instrumentation Engineers. [DOI: 10.1117/1.3152000]