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论文类型：期刊论文

发表时间：2008-01-01

发表刊物：INTERNATIONAL JOURNAL OF NONLINEAR SCIENCES AND NUMERICAL SIMULATION

收录刊物：SCIE、Scopus

卷号：9

期号：4

页面范围：333-338

ISSN号：1565-1339

关键字：Reduced-order model; Krylov subspace; microgripper

摘要：The conventional numerical analysis methods could not perform the rapid system-level simulation to MEMS especially when it containing sensing and testing integrated circuit. The behavior characteristic of multiphysical energy domain models including nonlinear analysis can be simulated by using reduced-order model. This paper set up the reduced-order model of electrothermal microgripper using Krylov subspace projection method. The system functions were assembled through finite element analysis using Ansys. We took the structure-electro-thermal analysis to microgripper finite element model and reduced finite element functions order through second-order Krylov subspace. projection method based on Arnoldi process. The simulation result from electrothermal reduced order model of microgripper is accurately compared with finite element analysis and even more needs a few computing consuming.