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论文类型：期刊论文

发表时间：2018-04-23

发表刊物：APPLIED PHYSICS LETTERS

收录刊物：SCIE

卷号：112

期号：17

ISSN号：0003-6951

摘要：Perovskite LaBaCo(2)O(5)thornd (LBCO) single-crystal films were deposited on (001) MgO substrates by a magnetron sputtering method and processed into Pirani sensors for investigation of pressure measurements. In comparison to the poly-crystal film deposited under the same condition, the single-crystal LBCO films exhibited rather a large temperature coefficient of resistance and a high sensitivity in response to pressure. The LBCO sensors with dimensions of 30 to 200 mu m, which are different from resistor-on-dielectric membrane or micro-beam structures, demonstrated to be capable of making response to the pressures ranging from 5 x 10(-2) to 10(5) Pa with a real dynamic range of 3 to 2 x 10(3) Pa. Published by AIP Publishing.