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低温等离子体增强裂解氟化硅制备太阳级高纯多晶硅

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Leading Scientist:xufumin

Status:结题

Supported by:大连理工大学

Nature of Project:纵向

Project Approval Number:DUTNYX2009211

Date of Project Approval:2009-01-01

Scheduled completion time:2011-07-31

Date of Project Initiation:2009-01-01

Date of Project Completion:2011-07-31

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