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AIN陶瓷基板材料热导率与烧结助剂的研究进展

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Indexed by: Journal Article

Date of Publication: 2009-09-10

Journal: 材料导报

Included Journals: CSCD、ISTIC、PKU

Volume: 23

Issue: 17

Page Number: 56-62

ISSN: 1005-023X

Key Words: A1N;热导率;烧结助剂

Abstract: AIN陶瓷因具有高热导率、低介电常数、与硅相匹配的热膨胀系数等优异性能,被认为是替代Al2O3和BeO陶瓷的理想基板材料.主要讨论了AIN陶瓷的导热机理及影响热导率的因素;介绍了A1N陶瓷烧结助刑的选取原则、几种烧结助刺的作用机理及优缺点,并从高温烧结助剂体系和低温烧结助剂体系2个方面介绍了AIN陶瓷研究的最新进展.

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