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用于制备氮化硅的四氯化硅回收精制工艺

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Date of Publication:2024-05-17

Journal:当代化工

Volume:52

Issue:05

Page Number:1125-1128+1136

Key Words:Aspen Plus; 四氯化硅; 氮化硅; 能量集成

CN No.:21-1457/TQ

Next One:基于模拟分析技术和随机搜索算法的化工过程能量集成方法研究
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