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Indexed by:会议论文

Date of Publication:2006-06-21

Included Journals:EI、CPCI-S、Scopus

Volume:2

Page Number:5363-+

Key Words:data acquisition; RS-485 bus; long distance communication

Abstract:A monitoring system of GaN growth process is introduced. Data acquisition modules, main temperature-controBer and flowmeters are connected with standard RS-485 bus to compose the RS-485 network Gas flow rates are set by the output voltage of D/A board. Vacuometers and assistant temperature-controller are connected with serial ports. Acquisition, displaying, controlling, setting, alarming, and printing of variables in the process are implemented in system program.