Release Time:2019-03-12  Hits:

Indexed by: Conference Paper

Date of Publication: 2006-06-21

Included Journals: Scopus、CPCI-S、EI

Volume: 2

Page Number: 5363-+

Key Words: data acquisition; RS-485 bus; long distance communication

Abstract: A monitoring system of GaN growth process is introduced. Data acquisition modules, main temperature-controBer and flowmeters are connected with standard RS-485 bus to compose the RS-485 network Gas flow rates are set by the output voltage of D/A board. Vacuometers and assistant temperature-controller are connected with serial ports. Acquisition, displaying, controlling, setting, alarming, and printing of variables in the process are implemented in system program.