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Indexed by:会议论文

Date of Publication:2013-04-07

Included Journals:EI、CPCI-S、Scopus

Page Number:225-228

Key Words:PZT bimorph; vibration performance; finite element models; micropump

Abstract:Check valve micro-pump is easy to reach high flow rate and has a promising application prospect in micro fluidic devices and artificial organs. There are several vibration elements in check valve pump, including actuator, membrane and valves. The vibration performances of these elements have a coupling influence on the performance of micro-pump. In this paper, the comprehensive analysis was carried out using finite element model. Four kinds of micro-pumps with different valves and actuators were designed and fabricated. The performances of each kind of micro-pumps are studied by frequency sweeping experiments. Experimental results approximately coincide with the theoretical analysis. This research provides a theoretical and experimental basis for subsequent micro-pump design.