点击次数：

论文类型：期刊论文

发表时间：2011-03-01

发表刊物：Journal of Semiconductors

收录刊物：EI、ISTIC、Scopus

卷号：32

期号：3

ISSN号：16744926

摘要：Solar cells are currently fabricated from a variety of silicon-based materials. Now the major silicon material for solar cells is the scrap of electronic grade silicon (EG-Si). But in the current market it is difficult to secure a steady supply of this material. Therefore, alternative production processes are needed to increase the feedstock. In this paper, EBM is used to purify silicon. MG-Si particles after leaching with an initial purity of 99.88% in mass as starting materials were used. The final purity of the silicon disk obtained after EBM was above 99.995% in mass. This result demonstrates that EBM can effectively remove impurities from silicon. This paper mainly studies the impurity distribution in the silicon disk after EBM. ? 2011 Chinese Institute of Electronics.