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AlN/自持金刚石膜结构高频声表面波滤波器的研制

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Leading Scientist:baiyizhen

Supported by:国家自然科学基金项目

Sub-Class of Project:专项基金项目

Status:结题

Supported by:国家自然科学基金委员会

Nature of Project:纵向

Project Approval Number:61040058

Date of Project Approval:2010-09-25

Scheduled completion time:2011-12-31

Date of Project Initiation:2011-01-01

Date of Project Completion:2011-12-31